1200 Degree Laboratory 3 Heating Zone Atmosphere Vacuum CVD Tube Furnace For Annealing Diffusion Sintering Materials
It is used for metal, alloy,Non-metal materials Annealing, diffusion or sintering ,also as CVD experiment in wide variety of reaction temperature about 1100°C, also be used: vacuum sintering, vacuum sintering atmosphere, nano materials making, battery material preparation and other many research fields.
Furnace Structure & Chamber:
High purity fibrous alumina insulation for maximum energy saving 60-80% less power consumption than old style.
Heavy duty double layer structure with cooling fan to keep furnace exteriors safe to touch.
Heat treatment 3 heating zone tube furnace details specification :
|Rated Voltage & Power:||AC 380V 50/60Hz, 15kw|
|Inner Chamber Size:||Quartz tube OD80mm,Tube OD 40-120mm or bigger;|
Single heating zone:300mm L; Single/ 2/3/5 or more heating zone optional.
Each zone: 150/200/300/400/600mm optional;
|Max. Temperature:||1200.C for short time ;|
|Continuous Working Temperature:||1100.C Max.|
|Max. Heating Rate:||0-30.C /min, suggest to be 10.C/Min;|
|Temperature Controller:||PID automatic control and auto-tune function,|
30 programmable segments for precise process.
Each heating zone with one controller.
|Temperature Accuracy:||+/- 1 .C.|
|Heating Element:||1200.C grade Fe-Cr-Al Alloy doped by Mo .|
|Thermocouple :||K type|
|Vacuum:||rough vacuum -0.1Mpa, 5000pa,10Pa, 1.33×10^-1Pa, 1.33×10^-3Pa optional;|
|Vacuum gague :||regular vacuum gagule(-0.1-0.15Mpa),Digital vacuum gague, resistance vacuum gague (10*5Pa-10*-1Pa),composite vacuum gague (10*5Pa-10*-5Pa) optional;|
|Atmosphere||Inert gas,N2,O2,CO2,Air gas available.|
|Gas mixing system:||2/3/4/5 Float flowmeter gas control/MFC gas control system; With One mixing tank;|
flowmeter range: 0.03-0.3SLM,10-100SCCM,16-160ml/min,25-250cc/min optional;
For precision gas control, you can choose digital mass flow Control system instaed of float-meter.
SLM 0~1, 2, 3, 5, 10,15, 20, 30
|Standard Parts:||Crucible tongs 1pc, high temperature gloves 1 pair , one user manual.|
|Optional parts:||PLC touch screen controller, paperless recorder,Remote communication control system, 2-3 gas channels mixing system desktop.|
Warranty: One year limited warranty with lifetime support, excluding heating element,cooling fans, thermocouple and ceramic tube damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty.
Three heating zone tube furnace Application Notes:
(1)Furnace tube pressure can not be higher than 0.02MPa
(2)As the internal pressure of the cylinder is high, so the gas into the furnace tube, the cylinder must be installed on the valve, the proposed purchase of the company pressure valve, the company valve range of 0.01MPa-0.1MPa, Will be more accurate and safe
(3)When the furnace temperature is higher than 1000 ℃, the furnace tube can not be in a vacuum state, the furnace pressure and atmospheric pressure equivalent to maintain the atmospheric pressure
(4)The gas flow into the furnace tube should be less than 200 SCCM to avoid the impact of cold airflow on the heated quartz tube.